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August 2008 New Low Loss SiNx:H film for quantum computing: We have measured SiNx films in resonator circuits at 30 mK and in the low energy limit relevant for superconducting qubits. In this intrinsic regime, we find that the loss tangent can vary by over a factor of ten in ICP CVD films, and the better film advances the state of the art in silicon nitride.
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New Josephson junction fabrication facilities: A new multitarget sputtering system with ion mill and oxidation capabilities was recently installed by our group to make Josephson junctions embedded within superconducting quantum circuits. |
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