Laser Fabricated Optical Elements in Polymers
Microscopic 3-D structures needed for new optical devices are often difficult to fabricate by conventional micro-fabrication techniques. Direct excimer laser ablation (basically the same process as the one used for used for laser eye surgery) can be used to fabricate such optical structures.
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Excimer laser fabricated (a) waveguide undercut and (b) diffraction grating for input/output coupling to polymer optical waveguides. (c) A laser-fabricated vortex lens with applications for optical image processing, high density optical data storage and optical fabrication of nano-scale structures.
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